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2014•Journal of Beijing Normal UniversityRequires access

DEVELOPMENT AND APPLICATIONS OF MEVVA TECHNIQUE AT BNU:A REVIEW

WU Xianyin

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Abstract

MEVVA sources or high density metal plasma produced by metal vapor vacuum arc,is widely used in material surface modifications;Metal ions of MEVVA are introduced into vacuum chamber by two or three extraction-electrode systems.The performance of tools and parts is excellent after modification by MEVVA technique,therefore its wide use in material surface modification.In filter cathode vacuum arc system(FCVA),big particles are filtered by magnetic field produced by 45°bent copper pipe,and films deposited by FCVA system have superior properties,such as high film density and excellent film quality.Film adhesion to substrates(on ceramics or glass)can be improved significantly by combining MEVVA and FCVA systems. The main development and applications of MEVVA and FCVA systems in Beijing Normal university are summarized.

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What this paper is about

MEVVA sources or high density metal plasma produced by metal vapor vacuum arc,is widely used in material surface modifications;Metal ions of MEVVA are introduced into vacuum chamber by two or three extraction-electrode systems.The performance of tools and parts is excellent after modification by MEVVA technique,therefore its wide use in material surface modification.In filter cathode vacuum arc system(FCVA),big particles are filtered by magnetic field produced by 45°bent copper pipe,and films deposited by FCVA system have superior properties,such as high film density and excellent film quality.Film adhesion to substrates(on ceramics or glass)can be improved significantly by combining MEVVA and FCVA systems. The main development and applications of MEVVA and FCVA systems in Beijing Normal university are summarized.

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Available abstract

MEVVA sources or high density metal plasma produced by metal vapor vacuum arc,is widely used in material surface modifications;Metal ions of MEVVA are introduced into vacuum chamber by two or three extraction-electrode systems.The performance of tools and parts is excellent after modification by MEVVA technique,therefore its wide use in material surface modification.In filter cathode vacuum arc system(FCVA),big particles are filtered by magnetic field produced by 45°bent copper pipe,and films deposited by FCVA system have superior properties,such as high film density and excellent film quality.Film adhesion to substrates(on ceramics or glass)can be improved significantly by combining MEVVA and FCVA systems. The main development and applications of MEVVA and FCVA systems in Beijing Normal university are summarized.

Key concepts: Vacuum arc, Materials science, Cathode, Surface modification, Nanotechnology, Chemical engineering, Chemistry, Engineering

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