Spectroscopic Investigation of Atmospheric Pressure Dielectric Barrier Discharge Plasma
Xiaoliang Tang
Abstract
Xiaoliang Tang
Abstract
Dielectric barrier discharge(DBD) plasma at atmospheric pressure has become higher and higher with its ever-increasing applications to surface modification of materials.For controlling the process of materials' surface modification promptly,the spectral lines of nitrogen and argon plasma emission were recorded and analyzed by using spectral diagnosis equipment of dielectric barrier discharge plasma at atmospheric pressure.The experimental results indicate that spectral diagnosis has been proved a workable method,and it is great importance to the diagnosis of dielectric barrier discharge at atmospheric pressure.
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Dielectric barrier discharge(DBD) plasma at atmospheric pressure has become higher and higher with its ever-increasing applications to surface modification of materials.For controlling the process of materials' surface modification promptly,the spectral lines of nitrogen and argon plasma emission were recorded and analyzed by using spectral diagnosis equipment of dielectric barrier discharge plasma at atmospheric pressure.The experimental results indicate that spectral diagnosis has been proved a workable method,and it is great importance to the diagnosis of dielectric barrier discharge at atmospheric pressure.
Key concepts: Dielectric barrier discharge, Atmospheric pressure, Plasma cleaning, Plasma, Dielectric, Atmospheric-pressure plasma, Argon, Materials science