Su Yu
Abstract
Microfluidic systems,which are based on silicon micromaching technologies,are an important branch of MEMS. They can be extensively applied to aeronautics,biology,medicine,chemistry and electronics. In this paper,the structure,working principle,and the newest progress of several kinds of micropump are presented.
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Microfluidic systems,which are based on silicon micromaching technologies,are an important branch of MEMS. They can be extensively applied to aeronautics,biology,medicine,chemistry and electronics. In this paper,the structure,working principle,and the newest progress of several kinds of micropump are presented.
Key concepts: Micropump, Microelectromechanical systems, Microfluidics, Nanotechnology, Engineering, Electronics, Mechanical engineering, Engineering physics