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Preparation of ZnSe Thin Film by Single Source Vacuum Evaporation

Hongwen Ma

Abstract

ZnSe thin film were preparated by vacuum evaporation.The composition and structures of ZnSe thin film were studied by EMPA and XRD with the change of temperature of evaporation,temperature of substrate,different substrates and temperature of heat treatment.The preparation and heat treatment method of ZnSe thin film by single source vacuum evaporation were established.

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Available abstract

Key concepts: Vacuum evaporation, Materials science, Evaporation, Thin film, Substrate (aquarium), EMPA, Ultra-high vacuum, Vacuum deposition