The determination of 12 trace-impurities in high purity molybdenum by inductively coupled plasma mass spectrometry

The interferences for Ca,Fe and Si produced by polyatomic ions were eliminated by H2 reaction technology and the other 9 impurities were determined directly by internal standard correction method.Under the optimized conditions of measured isotopes and internal standard elements,the matrix effects were investigated and the method for the analysis of 12 trace-impurities in high purity molybdenum was established.Determination limits obtained ranged between 0.10 and 0.37 μg/g for this 12 impurities.The accuracy of the method was evaluated by recovery measurements on spiked samples,and good recovery results(93-105%) with precision of less than 10% were achieved.The method was used for the analysis of high purity molybdenum bar and power,which proved that this method was suitable for the analysis of 4N~5N high purity molybdenum products.