Application of TEM and SAED on inorganic nano-materials
Jian Ouyang
Abstract
Jian Ouyang
Abstract
With the development of material science,it is necessary to build effective methods to understand nano-particles.Transmission electron microscope(TEM) can be used to measure size and morphology of nano-particles.Combined with selected area electron diffraction(SAED),it could further identify the crystal phases and structure of samples,thus to increase the accuracy and reliability in the analysis of samples.In the paper the advantages of combination of TEM and SAED are presented.The progress of application of TEM and SAED on microelectronic devices,high temperature structural materials and biominerals are reviewed.The problems faced and the developing directions were also indicated.
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With the development of material science,it is necessary to build effective methods to understand nano-particles.Transmission electron microscope(TEM) can be used to measure size and morphology of nano-particles.Combined with selected area electron diffraction(SAED),it could further identify the crystal phases and structure of samples,thus to increase the accuracy and reliability in the analysis of samples.In the paper the advantages of combination of TEM and SAED are presented.The progress of application of TEM and SAED on microelectronic devices,high temperature structural materials and biominerals are reviewed.The problems faced and the developing directions were also indicated.
Key concepts: Selected area diffraction, Transmission electron microscopy, Microelectronics, Nanotechnology, Materials science, Nano-, Electron diffraction, Electron microscope