Design on SOI Waveguide Coupler for an Intergrated Opto-Electronic Model of Miniature Fiber Optic Gyros

Based on the design demand of mininature of fiber optic gyroscope(FOG)and mass production of FOG,an idea based on model-design of FOG was presented.And a Y-type waveguide coupler on silicon-on-insulator(SOI)wafer used for an Intergrated opto-electronic Model was designed.The structure of the coupler has advantages in simple configuration,wide spectrum,easy to produce and opto-electronic integrate on one chip and so on.The influence of structure parameters of waveguide on the technical prarmeters(division ratio,loss)was analyzed.The designing of the coupler was improved using mode matching theory,and the loss of the coupler was decreased.In the end,the manufacture technics of the waveguide coupler was discussed.With electron beam lithography machine the mask of SOI waveguide coupler was fabricated.The mask fabrication parameters were developed and optimized.Experimantal results show that the division radio of the coupler is 50%:50%.When the length of the waveguide coupler is 25 mm,the width between the two export of waveguide is 300 μm,with less theoretical transmitting loss that can be neglected.It can satisfy the design requirment of FOG.