Design of Flexure Hinge Mechanism for 10~(-6)N～10~(-5) N Micro Force Measurement

In a micro-nano force measurement system based on the principle of static electric field,the mechanism used for force transmission and transformation plays a vital role. The parallelogram flexible hinge mechanism is used as elastic element,in order to realize the measurement of force on the scale of 10-6N. The mathematical model of the flexible hinge is analyzed to study the static and dynamic stiffness. The theory stiffness is determined according to the system requirement. The finite element method is used for the optimization design and modal analysis. The influence to the hinge stiffness of the machining accuracy is analyzed. The stiffness test and force value measurement results are given by experiments. Results show that the parallelogram flexible hinge can be used in the force measurement system on the scale of 10-6N.