Design of a Beam-Membrane Piezoresistive Accelerometer Based on MEMS Technology

In this paper,a kind of new structure piezoresistive accelerometer was designed.The beam-membrane structure was designed to improve the natural frequency and reduce deflection of the piezoresistive micro-silicon accelerometer sensor with low range.The static and modal simulations were carried out by ANSYS software,the results indicated that the new structure compared to the traditional structure,its natural frequency increased by 39 percent and deflection decreased by 39 percent on average in the same load conditions.The structure was optimized by discussing the factors which can affect the sensitivity and natural frequency. The resistance of the sensor distribution and structural parameters were also established.The fabrication operated on the single silicon substrate and applied the technology of anisotropy chemical.The silicon layer was anodic bonded with glass substrate to improve the reliability of the accelerometer.Finally,a feasible processing flow is designed,the micro-silicon accelerometer has the merit of small size,high frequency and high precision.