Investigation on Applying High-order Piezoelectric Effect to Sensors and Actuators

The direct and converse piezoelectric effects of the electromechanical coupling process are widely applied to sensor and actuators.But there are some serious problems during application of piezoelectric sensor and actuator,e.g.non-linear problem.Most piezoelectric solids has nonlinear behavior,especially piezoelectric ceramic,its inherent characteristics are non-linear and hysteretic characteristic.In this paper,the nonlinear of piezoelectric solids is discussed,the impaction of high order piezoelectric effect on piezoelectric sensor and actuator is verified through the experiments,the compensation and method of correction are presented.As the result,measurement and control precision of sensor and actuator are improved by applying this theory.