2012•Surface TechnologyRequires access

A Review of Vacuum Arc Deposition and Its Application in Hardness Films

Zhao Dong-cai

Abstract

The progress of vacuum arc deposition has been discussed from arc mode of operation and the technology of macroparticles filter,and then,the application and progress in hardness films,such as ta-C,CNx,nitride,oxide and advanced films,have been described.The aim of this paper is providing a reference in vacuum arc deposition and its application for researchers in our nation.

About this research paper

What this paper is about

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Vacuum arc, Arc (geometry), Deposition (geology), Cathodic arc deposition, Materials science, Vacuum deposition, Nitride, Metallurgy