2009•MRS ProceedingsRequires access

Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode

Seunghun Lee, Igor Svadkovski, Jong‐Kuk Kim, Do-Geun Kim

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Key concepts: Materials science, Cathode, Coating, Sputter deposition, Sputtering, Cavity magnetron, X-ray photoelectron spectroscopy, Composite material

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Properties of Ti-Si-N Hard Coatings Prepared by Filtered Vacuum Arc Source and Magnetron Sputtering Cathode — Research Paper | ScholarLens