2014•IOSR Journal of Electronics and Communication EngineeringOpen access
Design Considerations for Mems Devices
Mantha Anil Srimanth, K. V. Krishna Rao, Perna Kishor Krishna, Arra Ashok
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Abstract
The market of the consumer electronics, automobiles is now taken over by MEMS.MEMS or Microsystems technology or Micromachined Devices is a technology where micro-level electro-mechanical elements are fabricated, in which there exists no physical movement of mechanical parts to the more complex electromechanical systems.These also contain a micro level sensors and actuators which have the mechanical motion inside the chip.
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