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1995•MRS ProceedingsRequires access

Ion Beam Reactive Sputter-Deposition of Silicon and Zirconium Oxides.

Steven Pringle, Řeža Valizadeh, J.S. Colligon, Chester A. Faunce, H. Kheyrandish

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Key concepts: Materials science, Zirconium, Sputtering, Silicon, Cubic zirconia, Argon, Amorphous solid, Stoichiometry

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