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Reflection High-Energy Electron Diffraction (RHEED)

Masakazu Ichikawa

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Abstract

Principle and characteristic of reflection high-energy electron diffraction (RHEED) are described paying to the relations between RHEED patterns and surface morphologies. Some examples indicating the relations are shown. Micro-probe RHEED is also described, in which focused electron beams are used for obtaining crystalline information from surface micro-areas. An in situ observation result of Si thin film growth is shown as an example.

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Principle and characteristic of reflection high-energy electron diffraction (RHEED) are described paying to the relations between RHEED patterns and surface morphologies. Some examples indicating the relations are shown. Micro-probe RHEED is also described, in which focused electron beams are used for obtaining crystalline information from surface micro-areas. An in situ observation result of Si thin film growth is shown as an example.

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Available abstract

Principle and characteristic of reflection high-energy electron diffraction (RHEED) are described paying to the relations between RHEED patterns and surface morphologies. Some examples indicating the relations are shown. Micro-probe RHEED is also described, in which focused electron beams are used for obtaining crystalline information from surface micro-areas. An in situ observation result of Si thin film growth is shown as an example.

Key concepts: Reflection high-energy electron diffraction, Electron diffraction, Reflection (computer programming), Diffraction, Optics, Electron, Materials science, Physics

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