Pumping Mechanism and Development of a Getter Ion Pump
Toshio Sugita, Isao Kohno, Jirô Watanabé, Koji Kawasaki
Abstract
Open-access reader
Toshio Sugita, Isao Kohno, Jirô Watanabé, Koji Kawasaki
Abstract
Open-access reader
A getter ion pump has been often used for the evacuation of ultra-high vacuum mass spectrometer. However, it had been found previously that diode type getter ion pump exhiblts spontaneous periodic pressure fluctuations for argon. In order to stabilize these fluctuations for inert gases, a new modification of the construction of triode type getter ion pump in some different to the triode pumps already reported elsewhere has been made. Pumping mechanisms of diode pump and our triode pump have been examined by the use of radioactive Xe131m, and some problems in these pumps have been made clear.
OpenAlex reports 1 citations for this work. Citation counts describe recorded attention and do not establish research quality.
A contribution statement is not available in the OpenAlex record.
Method details are not available in the OpenAlex metadata.
Findings are not separately available in the OpenAlex metadata.
Limitations are not available in the OpenAlex metadata.
Application details are not available in the OpenAlex metadata.
A getter ion pump has been often used for the evacuation of ultra-high vacuum mass spectrometer. However, it had been found previously that diode type getter ion pump exhiblts spontaneous periodic pressure fluctuations for argon. In order to stabilize these fluctuations for inert gases, a new modification of the construction of triode type getter ion pump in some different to the triode pumps already reported elsewhere has been made. Pumping mechanisms of diode pump and our triode pump have been examined by the use of radioactive Xe131m, and some problems in these pumps have been made clear.
Key concepts: Getter, Triode, Ion pump, Diode, Ion, Materials science, Optoelectronics, Argon