Microbolometer terahertz focal plane array and camera with improved sensitivity at 0.5–0.6 THz
Naoki Oda, Seiji Kurashina, Masaru Miyoshi, Kohei Doi, Tsutomu Ishi, Takayuki Sudou, Takao Morimoto, Hideki Goto, Tokuhito Sasaki
Abstract
Naoki Oda, Seiji Kurashina, Masaru Miyoshi, Kohei Doi, Tsutomu Ishi, Takayuki Sudou, Takao Morimoto, Hideki Goto, Tokuhito Sasaki
Abstract
Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5-0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4-5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2.5, 0.6 and 0.5 THz for the THz-FPAs (640×480, 320×240) with the modified structure and those (320×240) with the previous structure.
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Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5-0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4-5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2.5, 0.6 and 0.5 THz for the THz-FPAs (640×480, 320×240) with the modified structure and those (320×240) with the previous structure.
Key concepts: Terahertz radiation, Microbolometer, Cardinal point, Pixel, Optics, Sensitivity (control systems), Optoelectronics, Materials science