2014Unpublished venueRequires access

Microbolometer terahertz focal plane array and camera with improved sensitivity at 0.5–0.6 THz

Naoki Oda, Seiji Kurashina, Masaru Miyoshi, Kohei Doi, Tsutomu Ishi, Takayuki Sudou, Takao Morimoto, Hideki Goto, Tokuhito Sasaki

Open publisher page 22 citations

Abstract

Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5-0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4-5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2.5, 0.6 and 0.5 THz for the THz-FPAs (640×480, 320×240) with the modified structure and those (320×240) with the previous structure.

About this research paper

What this paper is about

Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5-0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4-5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2.5, 0.6 and 0.5 THz for the THz-FPAs (640×480, 320×240) with the modified structure and those (320×240) with the previous structure.

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Available abstract

Sensitivity of microbolometer Terahertz (THz) focal plane array (FPA) is improved by one order of magnitude at 0.5-0.6 THz, comparing with the previous THz-FPA. This is achieved by modifying an optical cavity structure in a pixel, such that the optical cavity length is extended by a factor of 4-5 than that of the previous structure. Minimum detectable powers (MDPs) per pixel are measured at 4.3, 2.5, 0.6 and 0.5 THz for the THz-FPAs (640×480, 320×240) with the modified structure and those (320×240) with the previous structure.

Key concepts: Terahertz radiation, Microbolometer, Cardinal point, Pixel, Optics, Sensitivity (control systems), Optoelectronics, Materials science

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