2013Nano LettersRequires access

Graphene for True Ohmic Contact at Metal–Semiconductor Junctions

Kyung‐Eun Byun, Hyun‐Jong Chung, Jaeho Lee, Heejun Yang, Hyun Jae Song, Jinseong Heo, David H. Seo, Seong-Jun Park, Sung Woo Hwang, In-Kyeong Yoo, Kinam Kim

Open publisher page 120 citations

Abstract

The rectifying Schottky characteristics of the metal-semiconductor junction with high contact resistance have been a serious issue in modern electronic devices. Herein, we demonstrated the conversion of the Schottky nature of the Ni-Si junction, one of the most commonly used metal-semiconductor junctions, into an Ohmic contact with low contact resistance by inserting a single layer of graphene. The contact resistance achieved from the junction incorporating graphene was about 10(-8) ~ 10(-9) Ω cm(2) at a Si doping concentration of 10(17) cm(-3).

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What this paper is about

The rectifying Schottky characteristics of the metal-semiconductor junction with high contact resistance have been a serious issue in modern electronic devices. Herein, we demonstrated the conversion of the Schottky nature of the Ni-Si junction, one of the most commonly used metal-semiconductor junctions, into an Ohmic contact with low contact resistance by inserting a single layer of graphene. The contact resistance achieved from the junction incorporating graphene was about 10(-8) ~ 10(-9) Ω cm(2) at a Si doping concentration of 10(17) cm(-3).

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OpenAlex reports 120 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The rectifying Schottky characteristics of the metal-semiconductor junction with high contact resistance have been a serious issue in modern electronic devices. Herein, we demonstrated the conversion of the Schottky nature of the Ni-Si junction, one of the most commonly used metal-semiconductor junctions, into an Ohmic contact with low contact resistance by inserting a single layer of graphene. The contact resistance achieved from the junction incorporating graphene was about 10(-8) ~ 10(-9) Ω cm(2) at a Si doping concentration of 10(17) cm(-3).

Key concepts: Ohmic contact, Contact resistance, Schottky barrier, Graphene, Materials science, Semiconductor, Metal–semiconductor junction, Schottky diode

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