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Numerical modeling of axisymmetric and three-dimensional flows in MEMS nozzles

Alina A Alexeenko, Sergey Gimelshein, Deborah A. Levin, Robert John Collins

Open publisher page 45 citations

Abstract

A numerical study of three-dimensional effects on the performance of a micronozzle fabricated from flat silicon wafer is performed by both continuum and kinetic approaches. The nozzle operates in a low Reynolds numbers regime and viscous effects dominate the gas expansion. Thrust losses occur because the shear on the wall is greater in the nozzle of a flat configuration compared to an axisymmetric conical nozzle. Therefore, the prediction of the micronozzle performance based on axisymmetric or two-dimension al modeling can lead to significant design errors.

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What this paper is about

A numerical study of three-dimensional effects on the performance of a micronozzle fabricated from flat silicon wafer is performed by both continuum and kinetic approaches. The nozzle operates in a low Reynolds numbers regime and viscous effects dominate the gas expansion. Thrust losses occur because the shear on the wall is greater in the nozzle of a flat configuration compared to an axisymmetric conical nozzle. Therefore, the prediction of the micronozzle performance based on axisymmetric or two-dimension al modeling can lead to significant design errors.

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OpenAlex reports 45 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

A numerical study of three-dimensional effects on the performance of a micronozzle fabricated from flat silicon wafer is performed by both continuum and kinetic approaches. The nozzle operates in a low Reynolds numbers regime and viscous effects dominate the gas expansion. Thrust losses occur because the shear on the wall is greater in the nozzle of a flat configuration compared to an axisymmetric conical nozzle. Therefore, the prediction of the micronozzle performance based on axisymmetric or two-dimension al modeling can lead to significant design errors.

Key concepts: Nozzle, Rotational symmetry, Conical surface, Mechanics, Reynolds number, Thrust, Microelectromechanical systems, Mechanical engineering

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