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2016•Sensors and Actuators A PhysicalRequires access

A real time error measuring device for meso-scale machine tools

Hau-Wei Lee, Kuo-Yi Huang, Huan-Tsai Peng, Chien‐Hung Liu

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Key concepts: Interferometry, Observational error, Optics, Range (aeronautics), Machine tool, Optical path, Laser, Laser tracker

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