Improving a-Si/µc-Si Thin Film Solar Cell Coatings by New Process Power Supplies

Thin film solar cell production is a strongly emerging industry with an immense potential for the future. Key is a variety of plasma-based deposition processes. Film quality, throughput and process repeatability characterize the level of modern film deposition tools. In the age of solar cell mass production, economic factors like cost optimization and energy efficiency determine the potential and value of a given solar cell production technology. As a key component in thin film depositions tools, plasma power supplies have a strong influence on all of the above criteria. Improvements in power supply technology directly result in better and lower cost solar cells. HÜTTINGER introduces two new types of plasma power supply technologies. The new features are specifically tuned to achieve the required top results in quality, repeatability and cost leadership for solar cell production.