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Testing EUV optics with EUV light: If you can measure it, you can make it

Kenneth A. Goldberg

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Abstract

Testing EUV optics with EUV light: If you can measure it, you can make it.

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Testing EUV optics with EUV light: If you can measure it, you can make it.

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Available abstract

Testing EUV optics with EUV light: If you can measure it, you can make it.

Key concepts: Extreme ultraviolet lithography, Extreme ultraviolet, Optics, Photolithography, Interferometry, Wavelength, Materials science, Measure (data warehouse)

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