Design And Numerical Analysis Of An Electro-Mechanical Microsystem For Material ParameterExtraction

The increasing complexity of microsystem designs requires the simulation at system level. We demonstrate that a pragmatic and efficient approach consists in the appropriate extension of standard electric circuit simulation, using compact models written in HDL-A for the nonelectrical parts of the microsystem. To this end we developed a microsystem that exhibits a strong electro-mechanical coupling. Based on the results of numerical simulations we propose it as a test-structure for the easy to perform electrical measurement of mechanical material properties.