Effect of Phosphorus Gettering on Electrical Properties of N-Type Multicrystalline Ingots Grown by Different Thermal Profiles
P. Supajariyawichai, M. Dhamrin, A. Uzum, Tadashi Saitoh, K. Kamisako, I. Yamaga
Abstract
P. Supajariyawichai, M. Dhamrin, A. Uzum, Tadashi Saitoh, K. Kamisako, I. Yamaga
Abstract
This paper presents the effect of phosphorus gettering on electrical properties of n-type multicrystalline silicon ingots grown by different solidification processes, A and B. Effective carrier lifetimes of the n-type mc-Si wafers cut from the both ingots increased after phosphorus diffusion at 875 oC. Furthermore, the ingot grown by method B has a better response to P-gettering than the ingot grown by method A especially at the top regions. In addition, effective carrier lifetimes increased after P-diffusion at all parts of the ingot grown by method B, especially near the top and the bottom of the ingot.
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This paper presents the effect of phosphorus gettering on electrical properties of n-type multicrystalline silicon ingots grown by different solidification processes, A and B. Effective carrier lifetimes of the n-type mc-Si wafers cut from the both ingots increased after phosphorus diffusion at 875 oC. Furthermore, the ingot grown by method B has a better response to P-gettering than the ingot grown by method A especially at the top regions. In addition, effective carrier lifetimes increased after P-diffusion at all parts of the ingot grown by method B, especially near the top and the bottom of the ingot.
Key concepts: Getter, Phosphorus, Materials science, Metallurgy, Thermal, Optoelectronics, Thermodynamics, Physics