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Effect of Phosphorus Gettering on Electrical Properties of N-Type Multicrystalline Ingots Grown by Different Thermal Profiles

P. Supajariyawichai, M. Dhamrin, A. Uzum, Tadashi Saitoh, K. Kamisako, I. Yamaga

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Abstract

This paper presents the effect of phosphorus gettering on electrical properties of n-type multicrystalline silicon ingots grown by different solidification processes, A and B. Effective carrier lifetimes of the n-type mc-Si wafers cut from the both ingots increased after phosphorus diffusion at 875 oC. Furthermore, the ingot grown by method B has a better response to P-gettering than the ingot grown by method A especially at the top regions. In addition, effective carrier lifetimes increased after P-diffusion at all parts of the ingot grown by method B, especially near the top and the bottom of the ingot.

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What this paper is about

This paper presents the effect of phosphorus gettering on electrical properties of n-type multicrystalline silicon ingots grown by different solidification processes, A and B. Effective carrier lifetimes of the n-type mc-Si wafers cut from the both ingots increased after phosphorus diffusion at 875 oC. Furthermore, the ingot grown by method B has a better response to P-gettering than the ingot grown by method A especially at the top regions. In addition, effective carrier lifetimes increased after P-diffusion at all parts of the ingot grown by method B, especially near the top and the bottom of the ingot.

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Available abstract

This paper presents the effect of phosphorus gettering on electrical properties of n-type multicrystalline silicon ingots grown by different solidification processes, A and B. Effective carrier lifetimes of the n-type mc-Si wafers cut from the both ingots increased after phosphorus diffusion at 875 oC. Furthermore, the ingot grown by method B has a better response to P-gettering than the ingot grown by method A especially at the top regions. In addition, effective carrier lifetimes increased after P-diffusion at all parts of the ingot grown by method B, especially near the top and the bottom of the ingot.

Key concepts: Getter, Phosphorus, Materials science, Metallurgy, Thermal, Optoelectronics, Thermodynamics, Physics

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