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Research on Surface Passivation of Tio2 and Sio2 Thin Films for Cz Silicon Wafers

Bingyan Ren, Bing Zhang, Bei Guo, Yan Zhang, Hongyuan Li, Xudong Li

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Key concepts: Passivation, Wafer, Materials science, Silicon, Thermal oxidation, Crystalline silicon, Optoelectronics, Thin film

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