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2005•ANU Open Research (Australian National University)Requires access

Dependence of phosphorous gettering of multicrystalline silicon on diffusion sheet resistance and ingot position

D.L. Bätzner, Jason Tan, Kathryn Hanton, Daniel Macdonald, Andrés Cuevas, S. Peters, Dirk Holger Neuhaus, Monalisa Ghosh

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Key concepts: Ingot, Getter, Materials science, Metallurgy, Silicon, Diffusion, Sheet resistance, Layer (electronics)

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Dependence of phosphorous gettering of multicrystalline silicon on diffusion sheet resistance and ingot position — Research Paper | ScholarLens