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Effect of gamma radiation on the distribution of specific resistance in the depth of epitaxial layers of silicon alloyed with phosphorus

N. Akurpekov, E.D. Belorusets, A. S. Lyutovich

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Key concepts: Silicon, Epitaxy, Phosphorus, Materials science, Radiation resistance, Radiation, Metallurgy, Radiochemistry

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Effect of gamma radiation on the distribution of specific resistance in the depth of epitaxial layers of silicon alloyed with phosphorus — Research Paper | ScholarLens