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Study of the properties of tungsten coatings produced by vapor-phase deposition

Yu.S. Kasatkin, L.N. Nagibin, A. I. Uzdalev, Yu.F. Fokin, V.A. Shurygin

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Key concepts: Tungsten, Deposition (geology), Materials science, Phase (matter), Vapor phase, Chemical vapor deposition, Metallurgy, Chemistry

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