2012•한국진공학회 학술발표회초록집Requires access

Measurement of Electron Density and Electron-neutral Collision Frequency Using Cutoff Probe Based on the Plasma Reactance Measurement

유광호, 김대웅, 나병근, 서병훈, 유신재, 김정형, 성대진, 신용현, 장홍영

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Key concepts: Collision frequency, Reactance, Cutoff, Electron, Electron density, Physics, Plasma, Atomic physics

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Measurement of Electron Density and Electron-neutral Collision Frequency Using Cutoff Probe Based on the Plasma Reactance Measurement — Research Paper | ScholarLens