1997•International Conference on VLSI and CADRequires access
Process Integration for a High Performance 0.35mm Merged Logic and DRAM Devices
Young Sun Oh, Young‐Pil Kim, In Kyun Jun, J. Chang, Dong Woo Kim, Ho Woo Park, Young Woo Seo, Chul Soon Kwon, Sun Yu, Duck‐Hyung Lee, Jong Shik Yoon, Chang Sik Choi
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