2015•Materials Science in Semiconductor ProcessingRequires access

Effect of hyperthermal annealing on LPCVD silicon nitride

Wanli Jiang, Dehui Xu, Shaokang Yao, Bin Xiong, Yuelin Wang

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Key concepts: Materials science, Annealing (glass), Residual stress, Chemical vapor deposition, Silicon nitride, Refractive index, Composite material, Nitride

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Effect of hyperthermal annealing on LPCVD silicon nitride — Research Paper | ScholarLens