2010•EU PVSECOpen access
Inline Processed Flexible Thin Film Silicon Solar Cells Using Linear PECVD Sources
Van Aken, B.B., Devilee, C., Dörenkämper, M., Heijna, M.C.R., Löffler, J., Soppe, W.J.
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Abstract
Using linear VHF- and RF-PECVD plasma sources, we have deposited intrinsic and doped silicon layers for roll-to-roll fabrication of thin film silicon solar cells on flexible steel foil substrates. First amorphous silicon solar cells have been made using this PECVD system resulting in efficiencies up to 6.6%.