Soft lithography for microfluidics: a review
Pilnam Kim, Keon Woo Kwon, Min Cheol Park, Sung Hoon Lee, Sun Min Kim, Kahp Yang Suh
Abstract
Pilnam Kim, Keon Woo Kwon, Min Cheol Park, Sung Hoon Lee, Sun Min Kim, Kahp Yang Suh
Abstract
Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasis on integrated microfluidic systems containing physical microstructures or a topographically patterned substrate. Relevant exemplary works based on the combination of various soft lithographic methods using microfluidics are introduced with some comments on their merits and weaknesses.
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Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasis on integrated microfluidic systems containing physical microstructures or a topographically patterned substrate. Relevant exemplary works based on the combination of various soft lithographic methods using microfluidics are introduced with some comments on their merits and weaknesses.
Key concepts: Microfluidics, Soft lithography, Nanotechnology, Lithography, Nanolithography, Materials science, Fabrication, Substrate (aquarium)