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Soft lithography for microfluidics: a review

Pilnam Kim, Keon Woo Kwon, Min Cheol Park, Sung Hoon Lee, Sun Min Kim, Kahp Yang Suh

Open publisher page 296 citations

Abstract

Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasis on integrated microfluidic systems containing physical microstructures or a topographically patterned substrate. Relevant exemplary works based on the combination of various soft lithographic methods using microfluidics are introduced with some comments on their merits and weaknesses.

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What this paper is about

Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasis on integrated microfluidic systems containing physical microstructures or a topographically patterned substrate. Relevant exemplary works based on the combination of various soft lithographic methods using microfluidics are introduced with some comments on their merits and weaknesses.

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Available abstract

Soft lithography has provided a low-expertise route toward micro/nanofabrication and is playing an important role in microfluidics, ranging from simple channel fabrication to the creation of micropatterns onto a surface or within a microfluidic channel. In this review, the materials, methods, and applications of soft lithography for microfluidics are briefly summarized with a particular emphasis on integrated microfluidic systems containing physical microstructures or a topographically patterned substrate. Relevant exemplary works based on the combination of various soft lithographic methods using microfluidics are introduced with some comments on their merits and weaknesses.

Key concepts: Microfluidics, Soft lithography, Nanotechnology, Lithography, Nanolithography, Materials science, Fabrication, Substrate (aquarium)

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