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LAPPING OF ADVANCED CERAMICS

C. Chen, Seisuke Sakai, Ichiro INASAKI

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Abstract

A series of lapping experiments were carried out with a specially designed lapping machine. Workpiece materials used in the experiments were representatives of advanced ceramics such as Si3N4 SiC, ZrO2 and Al203, Influence of the lapping pressure as well as the relative speed on the material removal process were investigated. The role of the hardness of the lapping plate on the lapping process was studiod. The results obtained through the present study provide some useful information for improving the efficiency of ceramics lapping.

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What this paper is about

A series of lapping experiments were carried out with a specially designed lapping machine. Workpiece materials used in the experiments were representatives of advanced ceramics such as Si3N4 SiC, ZrO2 and Al203, Influence of the lapping pressure as well as the relative speed on the material removal process were investigated. The role of the hardness of the lapping plate on the lapping process was studiod. The results obtained through the present study provide some useful information for improving the efficiency of ceramics lapping.

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Available abstract

A series of lapping experiments were carried out with a specially designed lapping machine. Workpiece materials used in the experiments were representatives of advanced ceramics such as Si3N4 SiC, ZrO2 and Al203, Influence of the lapping pressure as well as the relative speed on the material removal process were investigated. The role of the hardness of the lapping plate on the lapping process was studiod. The results obtained through the present study provide some useful information for improving the efficiency of ceramics lapping.

Key concepts: Lapping, Materials science, Ceramic, Process (computing), Mechanical engineering, Metallurgy, Computer science, Engineering

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