Burn J. Lin
Abstract
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The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
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The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry.
Key concepts: Lithography, Nanotechnology, Metrology, Electronics, Materials science, Engineering, Computer science, Physics