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1999•Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomenaRequires access

Reconstruction of Deep Level Defect Distribution from DLTS Measurements in Compensated Semiconductors

O. A. Soltanovich, E. B. Yakimov, Nikolai Yarykin

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Key concepts: Materials science, Semiconductor, Optoelectronics, Engineering physics, Deep-level transient spectroscopy, Silicon, Engineering

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Reconstruction of Deep Level Defect Distribution from DLTS Measurements in Compensated Semiconductors — Research Paper | ScholarLens