2007•Unpublished venueRequires access

Electrohydrodynamic (EHD) Micro-Boat

Jiun-Min Wang, Tzu-Yuan Lin, Lung‐Jieh Yang

Abstract

This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.

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Available abstract

Key concepts: Electrohydrodynamics, Microelectromechanical systems, Parylene, Fabrication, Voltage, Electrode, Planar, Materials science