2006•Energy and BuildingsRequires access

Feedback simulation of duct design for alkali exhaust system in a semiconductor factory

Wenliang Chen, Huei-Jiunn Chen, Sih‐Li Chen

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Key concepts: Factory (object-oriented programming), Duct (anatomy), Semiconductor, Engineering, Alkali metal, Manufacturing engineering, Automotive engineering, Mechanical engineering

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Feedback simulation of duct design for alkali exhaust system in a semiconductor factory — Research Paper | ScholarLens