2012•Winter Simulation ConferenceRequires access

Scheduling jobs with time constraints between consecutive process steps in semiconductor manufacturing

Andreas Klemmt, Lars Mönch

Abstract

In this paper, we consider flow shop scheduling problems for jobs with time constraints between consecutive process steps. We start by analyzing different types of time constraints that arise in semiconductor wafer fabrication facilities. A simple heuristic that sequentially schedules the jobs in a list scheduling manner is proposed. Moreover, a decomposition approach based on mixed integer programming is developed. The two approaches are compared by means of randomly generated problem instances.

About this research paper

What this paper is about

Why it matters

OpenAlex reports 40 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Key concepts: Scheduling (production processes), Semiconductor device fabrication, Wafer fabrication, Computer science, Job shop scheduling, Flow shop scheduling, Integer programming, Mathematical optimization