2003•Japanese Journal of Applied PhysicsRequires access

Thermal Desorption Process of Bromide on Si(111) Studied by Highly Sensitive Mass Spectroscopy

Tetsuro Shirao, Ken‐ichi Shudo, Yoshihito Tanaka, Toshinobu Nakajima, Tetsuya Ishikawa, Masatoshi Tanaka

Abstract

Thermal Desorption Process of Bromide on Si(111) Studied by Highly Sensitive Mass Spectroscopy, Shirao, Tetsuro, Shudo, Ken-ichi, Tanaka, Yoshihito, Nakajima, Toshinobu, Ishikawa, Tetsuya, Tanaka, Masatoshi

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Key concepts: Desorption, Thermal desorption spectroscopy, Thermal desorption, Analytical Chemistry (journal), Silicon, Isothermal process, Soft laser desorption, Mass spectrometry