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2010•Unpublished venueRequires access

A MEMS-based flexible electrode array using composite substrate

Tian‐Ling Ren, Bing Yan, Jian-Hui Lin, Xiaoming Wu, Ligang Wang, Yi Yang, Litian Liu

Open publisher page 4 citations

Abstract

We present a MEMS-based flexible subdural electrode array for neural recordings. The electrode array is fabricated on a composite substrate of polyimide and biomedical-grade polydimethylsiloxane(PDMS). The electrodes are deposited on polyimide layer, and the whole device is packaged by PDMS. Ablating with a CO2laser is applied to expose the electrodes sites. The surface of the electrodes is modified to increase the surface area, which can decrease interface impedance by nearly 90%. Prototypes of 2×4 and 2×1 arrays are fabricated with exposed electrode diameters of 0.5mm and 2.3mm respectively. After full package, the whole thickness of the electrode array is 0.7mm. For the 2×4 array, the average electrode impedance is 18.9 kΩ for normal 0.5mm electrodes and only 1.58kΩ for surface modified 0.5mm electrodes. The 2×1 array was successfully subdural implanted into a rabbit's brain, and get its electro-corticogram(ECoG).

About this research paper

What this paper is about

We present a MEMS-based flexible subdural electrode array for neural recordings. The electrode array is fabricated on a composite substrate of polyimide and biomedical-grade polydimethylsiloxane(PDMS). The electrodes are deposited on polyimide layer, and the whole device is packaged by PDMS. Ablating with a CO2laser is applied to expose the electrodes sites. The surface of the electrodes is modified to increase the surface area, which can decrease interface impedance by nearly 90%. Prototypes of 2×4 and 2×1 arrays are fabricated with exposed electrode diameters of 0.5mm and 2.3mm respectively. After full package, the whole thickness of the electrode array is 0.7mm. For the 2×4 array, the average electrode impedance is 18.9 kΩ for normal 0.5mm electrodes and only 1.58kΩ for surface modified 0.5mm electrodes. The 2×1 array was successfully subdural implanted into a rabbit's brain, and get its electro-corticogram(ECoG).

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Available abstract

We present a MEMS-based flexible subdural electrode array for neural recordings. The electrode array is fabricated on a composite substrate of polyimide and biomedical-grade polydimethylsiloxane(PDMS). The electrodes are deposited on polyimide layer, and the whole device is packaged by PDMS. Ablating with a CO2laser is applied to expose the electrodes sites. The surface of the electrodes is modified to increase the surface area, which can decrease interface impedance by nearly 90%. Prototypes of 2×4 and 2×1 arrays are fabricated with exposed electrode diameters of 0.5mm and 2.3mm respectively. After full package, the whole thickness of the electrode array is 0.7mm. For the 2×4 array, the average electrode impedance is 18.9 kΩ for normal 0.5mm electrodes and only 1.58kΩ for surface modified 0.5mm electrodes. The 2×1 array was successfully subdural implanted into a rabbit's brain, and get its electro-corticogram(ECoG).

Key concepts: Electrode, Polydimethylsiloxane, Materials science, Polyimide, Electrode array, Substrate (aquarium), Layer (electronics), Microelectromechanical systems

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