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1998•Sensors and Actuators A PhysicalRequires access

Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding

José Antonio Plaza, J. Estéve, E. Lora‐Tamayo

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Key concepts: Silicon nitride, Materials science, LOCOS, Silicon, Anodic bonding, Silicon oxide, Wafer, Layer (electronics)

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Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding — Research Paper | ScholarLens