A New Two-dimensional Analytical Model for Threshold Voltage in Undoped Surrounding-gate MOSFETs
Tzu Hsuan Chiang
Abstract
Tzu Hsuan Chiang
Abstract
Based on the fully and exact two-dimensional (2-D) resultant solution of Poisson's equation in oxide and silicon regions, a 2-D analytical model for threshold voltage undoped surrounding-gate MOSFETs is derived. The model show that the threshold voltage degradation agrees well with 2-D numerical simulation results over a wide range of device parameters even when the channel length scaled down to 20nm. Both the thin film and thin oxide are preferred to suppress the short-channel effects (SCEs). Besides providing the physical insight into the device physics, the model also offers the basic design guidance for the SG MOSFETs
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Based on the fully and exact two-dimensional (2-D) resultant solution of Poisson's equation in oxide and silicon regions, a 2-D analytical model for threshold voltage undoped surrounding-gate MOSFETs is derived. The model show that the threshold voltage degradation agrees well with 2-D numerical simulation results over a wide range of device parameters even when the channel length scaled down to 20nm. Both the thin film and thin oxide are preferred to suppress the short-channel effects (SCEs). Besides providing the physical insight into the device physics, the model also offers the basic design guidance for the SG MOSFETs
Key concepts: Threshold voltage, MOSFET, Gate oxide, Poisson's equation, Materials science, Range (aeronautics), Poisson distribution, Channel (broadcasting)