Silicon phononic crystal for surface acoustic waves
Sarah Benchabane, Abdelkrim Khelif, W. Daniau, Laurent Robert, V. Pétrini, Badreddine Assouar, Brice Vincent, Omar Elmazria, J. K. Krüger, Vincent Laude
Abstract
Sarah Benchabane, Abdelkrim Khelif, W. Daniau, Laurent Robert, V. Pétrini, Badreddine Assouar, Brice Vincent, Omar Elmazria, J. K. Krüger, Vincent Laude
Abstract
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Key concepts: Materials science, Acoustic wave, Piezoelectricity, Acoustic metamaterials, Acoustics, Band gap, Fabrication, Silicon