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Microstructure, Stress and Electrical Properties of the Highly Stable W/P+-In0.53Ga0.47 as Ohmic Contacts

Avishay Katz, D. M. Maher, P.M. Thomas, Bonnie E. Weir, William C. Dautremont-Smith, L. C. Kimerling

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Key concepts: Materials science, Ohmic contact, Sputtering, Microstructure, Thermal stability, Doping, Composite material, Refractory metals

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Microstructure, Stress and Electrical Properties of the Highly Stable W/P+-In0.53Ga0.47 as Ohmic Contacts — Research Paper | ScholarLens