2006•Unpublished venueRequires access
Non-Destructive Methods and Devices for the Inspection of Key Parameters of Semiconductor Materials
L.G. Lapatin, S. D. Votoropin
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Abstract
Diagnostics of semiconductor materials electrophysical parameters is a necessary part of the "know-how" both for semiconductor materials, and for various devices on their basis. The contactless, non-destroying quality monitoring is most suitable for these purposes for devices and installations.