An efficient single crystal BSE detector in SEM

Abstract Using the optical modifications described, the signal of the wide‐angle BSE detector can be increased 3.7‐fold compared with the detector type illustrated in Figure 1. The increase was achieved by more fully exploiting the optical phenomena of diffusion, reflection at the critical angle and antireflection, and especially that of their combined effects. A higher photon energy transfer was obtained by specific optical modifications to the scintillator and the light guide. Based on the current modifications, it can be estimated that about 75% of the generated light reaches the PMT. It is necessary, therefore, to revise all values previously published of the DQE coefficient of the YAG scintillator. A general value of DQE is of very limited use depending as it does on the specific conditions under which light emerges from the YAG scintillator. The DQE, therefore, does not permit sufficiently accurate comparison with other scintillation materials. The DQE can be evaluated only for a completed detector configuration in which the laws of geometrical optics apply, or it can be used for making comparisons of scintillation materials used in the same detector configuration.