Step Modelling of a High Precision 2DoF (Linear-Angular) Microsystem
Micky Rakotondrabe, Yassine Haddab, Philippe Lutz
Abstract
Micky Rakotondrabe, Yassine Haddab, Philippe Lutz
Abstract
In this paper, a new type of microsystem is presented : a system able to perform linear and angular motion. First, the microactuator used is studied. An approximation of the working equations is proposed in accordance with Finite-Element simulation. The microactuator used is inserted in the microsystem and a separated modelling of the whole system in linear and in angular motion is given. Stick and skid phases of each motion are independently studied.
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In this paper, a new type of microsystem is presented : a system able to perform linear and angular motion. First, the microactuator used is studied. An approximation of the working equations is proposed in accordance with Finite-Element simulation. The microactuator used is inserted in the microsystem and a separated modelling of the whole system in linear and in angular motion is given. Stick and skid phases of each motion are independently studied.
Key concepts: Microsystem, Microactuator, Linear motion, Linear system, Control theory (sociology), Finite element method, Linear approximation, Angular velocity