2008•Thin Solid FilmsRequires access

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

Hyungjun Kim, Han‐Bo‐Ram Lee, W. J. Maeng

Open publisher page 596 citations

Abstract

This record does not include an abstract. Use the full-text link above if available.

About this research paper

What this paper is about

An abstract is not available in the OpenAlex record for this paper.

Why it matters

OpenAlex reports 596 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Key concepts: Atomic layer deposition, Nanotechnology, Nanolithography, Fabrication, Nanoscopic scale, Nanometre, Materials science, Atomic layer epitaxy

Back to paper search Browse research topics Original source

Applications of atomic layer deposition to nanofabrication and emerging nanodevices — Research Paper | ScholarLens