Summary of ISO/TC 201 Standard: III ISO 14707:2000—Surface chemical analysis—Glow discharge spectrometry—Glow discharge optical emission spectrometry—Introduction for use
Arne Bengtson
Abstract
Arne Bengtson
Abstract
Abstract This International Standard gives guidelines for the use of glow discharge optical emission spectrometry (GDOES) for bulk and depth profile analysis of rigid solids. The sample is sputter etched in a glow discharge device and the element‐characteristic optical emission recorded simultaneously. The standard specifies the type of equipment used and gives general guidelines for the operation of such equipment. Measuring techniques and procedures for verification of analytical results also are given. Copyright © 2002 John Wiley & Sons, Ltd.
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Abstract This International Standard gives guidelines for the use of glow discharge optical emission spectrometry (GDOES) for bulk and depth profile analysis of rigid solids. The sample is sputter etched in a glow discharge device and the element‐characteristic optical emission recorded simultaneously. The standard specifies the type of equipment used and gives general guidelines for the operation of such equipment. Measuring techniques and procedures for verification of analytical results also are given. Copyright © 2002 John Wiley & Sons, Ltd.
Key concepts: Glow discharge, Analytical Chemistry (journal), Mass spectrometry, Sputtering, Chemistry, Materials science, Nanotechnology, Thin film